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Selected Patents
for which JBV Optical Products Company can make all required optical components... do YOU have a prototyping application requirement?

PATENT NUMBER- 05669979
PATENT ASSIGNEE(S)- UVTech Systems, Inc.
ASSIGNEE CITY- Wayland
ASSIGNEE STATE- MA

DESCRIPTION- A method of cleaning a substrate surface, the cleaning being done photoreactively without damaging the surface. A laser beam of UV radiation is delivered at an acute angle to the surface of the substrate, the beam striking the surface at a long and narrow reaction region. The beam and the substrate are moved relative to one another to cause the beam to sweep the surface. While the beam is sweeping the surface, a flow of a reactant gas is provided at the reaction region so that the gas is excited by the UV laser beam. The acute angle of the beam is of a value such that foreign material is removed without essentially damaging the surface of the substrate or leaving a residue that would inhibit further processing of the substrate surface.

EXEMPLARY CLAIMS- Claim- 1. A method of cleaning a substrate surface, the cleaning being done photoreactively without damaging the surface, comprising delivering a laser beam of UV radiation at an acute angle to the surface, the beam striking the surface at a long and narrow reaction region, said beam delivering 500 to 2,000 mJ/cm2 energy density measured normal to said surface when said beam is incident on said surface at an angle of 80 degrees with respect to normal; moving the beam and the substrate relative to one another to cause the beam to sweep the surface; and while the beam is sweeping the surface, providing a directed flow of a reactant gas or gas mixture at the reaction region so that the gas is excited by the UV laser beam and chemically interacts with foreign material on said substrate surface, the acute angle of the beam being of a value such that foreign material is removed form the substrate surface.

PATENT APPLICATION NUMBER- 697018
DATE FILED- 1996-08-16
PATENT DATE- 1997-09-23
NUMBER OF CLAIMS- 16
EXEMPLARY CLAIMS- 1
FIGURES- 29
ART/GROUP UNIT- 133
PATENT CLASS- Invention (utility) patent
ATTORNEY, AGENT, OR FIRM- Fish & Richardson P.C.
U.S. PATENT CLASS- 134001000O
U.S. CLASSIFICATION
REFS.- X134001100; X134001200; X134001300
INTERNATIONAL PATENT CLASS-
6B08B00312; B08B00702; B44C00122; C03C01500
PATENT REFERENCE(S)-
3118437; 3364087; 3464534; 3503804; 3890176; 4004152; 4028135;
4160166; 4181538; 4292093; 4305973; 4393311; 4414059; 4475027;
4484334; 4508749; 4568632; 4582540; 4615765; 4643799; 4668304;
4671848; 4680616; 4687539; 4692583; 4705593; 4718974; 4731158;
4731516; 4733944; 4749440; 4756047; 4782029; 4786358; 4857142;
4870923; 4877644; 4900395; 4938815; 4946763; 5004311; 5007983;
5022961; 5024968; 5044314; 5099557; 5114834; 5151134; 5151135;
5214685; 5228206; 5234540; 5236512; 5254176; 5279705; 5289263;
5531857
FOREIGN DOCUMENT REFERENCE(S)- 0 585 936 A2; 58-31528;
60-198437; 62-127655; 63-19809; 1-239837; 5-215692; 5-226790;
WO
91/03075
FOREIGN COUNTRY CODE- EPX; JPX; JPX; JPX; JPX; JPX; JPX;
JPX; WOX

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